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[Example of TOF-SIMS] Wide-area image map

Wide-area image map driven by stages! Introducing a measurement example that visualizes the distribution of magic.

We will introduce a case of TOF-SIMS that enables wide-area image map measurement by combining it with an electric stage. Two types of black markers were drawn on a metal plate, and wide-area (30mm × 30mm) image mapping measurement was conducted. It is difficult to distinguish between the two types of markers in the optical image, but by confirming the image map with characteristic secondary ion peaks for each marker, we can visualize the distribution of the markers. In addition, there are cases where detailed analysis results were obtained from the spectrum after wide-area image map measurement using TOF-SIMS. [Overview] ■ Standard measurement (beam scan measurement) targets sizes of 500μm × 500μm or smaller. ■ By combining with an electric stage, wide-area image map measurement is possible. *For more details, please refer to the PDF document or feel free to contact us.